Norm

ASTM E1127-08(2015)

Standard Guide for Depth Profiling in Auger Electron Spectroscopy

54,27

Over deze norm

Status Definitief
Aantal pagina's 5
Commissie E42.03
Gepubliceerd op 01-06-2015
Taal Engels

1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2 Guidelines are given for depth profiling by the following:

 

Section

Ion Sputtering 

6

Angle Lapping and Cross-Sectioning 

7

Mechanical Cratering 

8

Mesh Replica Method

9

Nondestructive Depth Profiling 

10

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.4 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Details

ICS-code 71.040.50
Nederlandse titel Standard Guide for Depth Profiling in Auger Electron Spectroscopy
Engelse titel Standard Guide for Depth Profiling in Auger Electron Spectroscopy

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