Norm

ASTM E1438-11

Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS

48,24

Over deze norm

Status Definitief
Aantal pagina's 3
Commissie E42.06
Gepubliceerd op 01-11-2011
Taal Engels

1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This guide does not apply to data obtained from analyses of specimens with thin markers or specimens without interfaces such as ion-implanted specimens.

1.2 This guide does not describe methods for the optimization of interface width or the optimization of depth resolution.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Details

ICS-code 29.045
Nederlandse titel Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
Engelse titel Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS

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