Over deze norm
1.1 This practice covers procedures for testing the sources of gas leaking at the rate of 1 × 10−8 Pa m3/s (1 × 10−9 standard-cm3/s at 0°C) or greater. These test methods may be conducted on any object that can be evacuated and to the other side of which helium or other tracer gas may be applied. The object must be structurally capable of being evacuated to pressures of 0.1 Pa (approximately 10−3 torr).
1.2 Three test methods are described;
1.2.1 Test Method A—For the object under test capable of being evacuated, but having no inherent pumping capability.
1.2.2 Test Method B—For the object under test with integral pumping capability.
1.2.3 Test Method C—For the object under test as in Test Method B, in which the vacuum pumps of the object under test replace those normally used in the leak detector (LD).
1.3 Units—The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
|Engelse titel||Standard Practice for Leakage Measurement Using the Mass Spectrometer Leak Detector or Residual Gas Analyzer in the Hood Mode|