Norm

ASTM E1634-11

Standard Guide for Performing Sputter Crater Depth Measurements

48,24

Over deze norm

Status Definitief
Aantal pagina's 3
Commissie E42.06
Gepubliceerd op 01-11-2011
Taal Engels

1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Details

ICS-code 71.040.50
Nederlandse titel Standard Guide for Performing Sputter Crater Depth Measurements
Engelse titel Standard Guide for Performing Sputter Crater Depth Measurements

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