Norm

ASTM E2246 - 05 en

Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer

  • Deze norm is ingetrokken sinds 01-11-2011

57,20 69,21 Incl BTW

Over deze norm

Status Ingetrokken
Aantal pagina's 16
Gepubliceerd op 01-11-2005
Taal Engels

1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer. Measurements from cantilevers that are touching the underlying layer are not accepted.

1.2 This test method uses a non-contact optical interferometer with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Details

ICS-code 37.040.20
Engelse titel Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer
Vervangen door

Winkelwagen

Subtotaal:

Ga naar winkelwagen