Norm

ASTM F1367-98(2011)

Standard Specification for Chromium Sputtering Targets for Thin Film Applications

48,24

Over deze norm

Status Definitief
Aantal pagina's 2
Commissie F01.17
Gepubliceerd op 01-06-2011
Taal Engels

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

Details

ICS-code 25.220.40
Nederlandse titel Standard Specification for Chromium Sputtering Targets for Thin Film Applications
Engelse titel Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Winkelwagen

Subtotaal:

Ga naar winkelwagen