Norm

ASTM F1513-99(2011)

Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications

48,24

Over deze norm

Status Definitief
Aantal pagina's 2
Commissie F01.17
Gepubliceerd op 01-06-2011
Taal Engels

1.1 This specification covers pure aluminum metal (unalloyed) for use in evaporation sources and sputtering targets. This material is intended as a raw material for electronic applications. The material is used as-supplied in some cases (for example, as e-beam evaporation sources). In other instances it may be remelted, alloyed, cast and processed by the purchaser to make finished products (for example, sputtering targets).

1.2 This specification sets purity grade levels, physical attributes, analytical methods, and packaging.

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

Details

ICS-code 31.200
Nederlandse titel Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications
Engelse titel Standard Specification for Pure Aluminum (Unalloyed) Source Material for Electronic Thin Film Applications

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