Norm

ASTM F1709 - 97(2016) en

Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications

45,11 54,58 Incl BTW

Over deze norm

Status Definitief
Aantal pagina's 3
Gepubliceerd op 01-05-2016
Taal Engels

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

1.2.1 The grade designation is a measure of total metallic impurity content. The grade designation does not necessarily indicate suitability for a particular application because factors other than total metallic impurity may influence performance.

Details

ICS-code 31.120
Engelse titel Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
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