Over deze norm
1.1 This test method covers the size distribution analysis of particulate contamination, 5 μm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (±33 % of the average of two runs) should be expected for replicate counts on the same sample.
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
|Nederlandse titel||Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces|
|Engelse titel||Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces|