Norm

ISO 11952:2014 en

Chemische analyse van oppervlakken - Scanning Probe Microscopy - Bepaling van geometrische grootheden die gebruik maken van SPM - Kalibratie van meetsystemen

147,90

Over deze norm

Status Definitief
Aantal pagina's 58
Gepubliceerd op 15-05-2014
Taal Engels
ISO 11952 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required. This International Standard has the following objectives: - to increase the comparability of measurements of geometrical quantities made using scanningprobe microscopes by traceability to the unit of length; - to define the minimum requirements for the calibration process and the conditions of acceptance; - to ascertain the instrument’s ability to be calibrated (assignment of a “calibrate-ability” category to the instrument); - to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability); - to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using a scanning-probe microscope; - to define the requirements for reporting results.

Details

ICS-code 71.040.40
Nederlandse titel Chemische analyse van oppervlakken - Scanning Probe Microscopy - Bepaling van geometrische grootheden die gebruik maken van SPM - Kalibratie van meetsystemen
Engelse titel Surface chemical analysis - Scanning-probe microscopy - Determination of geometric quantities using SPM: Calibration of measuring systems
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