Norm

ISO 13424:2013 en

Chemische analyse van oppervlakken - Röntgenfotoelektronenspectrometrie - Rapporteren van resultaten van dunne laag analyses

131,28

Over deze norm

Status Definitief
Aantal pagina's 46
Gepubliceerd op 01-10-2013
Taal Engels
This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

Details

ICS-code 71.040.40
Nederlandse titel Chemische analyse van oppervlakken - Röntgenfotoelektronenspectrometrie - Rapporteren van resultaten van dunne laag analyses
Engelse titel Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis
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