Norm

ISO 14644-14:2016 en

Schone ruimten en gelijksoortige beheerste omgevingen - Deel 14: Beoordeling van geschiktheid voor het gebruik van apparatuur voor deeltjesconcentratie in lucht

98,05

Over deze norm

Status Definitief
Aantal pagina's 21
Commissie Cleanrooms
Gepubliceerd op 15-09-2016
Taal Engels
ISO 14644-14 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 μm to equal to or larger than 5 μm (given in ISO 14644-1). The following items are not covered by this part of ISO 14644: - assessment of suitability with respect to biocontamination; - testing for suitability of decontamination agents and techniques; - cleanability of equipment and materials; - requirements on design of equipment and selection of materials; - physical properties of materials (e.g. electrostatic, thermal properties); - optimizing performance of equipment for specific process applications; - selection and use of statistical methods for testing; - protocols and requirements for local safety regulations.

Details

ICS-code 13.040.35
Nederlandse titel Schone ruimten en gelijksoortige beheerste omgevingen - Deel 14: Beoordeling van geschiktheid voor het gebruik van apparatuur voor deeltjesconcentratie in lucht
Engelse titel Cleanrooms and associated controlled environments - Part 14: Assessment of uitability or use of equipment by airborne particle concentration
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