ISO 14644-3:2019 en

Cleanrooms and associated controlled environments - Part 3: Test methods

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Status Definitief
Aantal pagina's 53
Commissie Cleanrooms
Gepubliceerd op 01-08-2019
Taal Engels
ISO 14644-3 provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational. The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements. This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices.


ICS-code 13.040.35
Engelse titel Cleanrooms and associated controlled environments - Part 3: Test methods



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