Norm

ISO 18516:2006 en

Chemische analyse van oppervlakken - Auger elektronenspectrometers en r?ntgenfotoelektronenspectrometers - Bepaling van zijdelingse resolutie

98,05

Over deze norm

Status Definitief
Aantal pagina's 24
Gepubliceerd op 01-11-2006
Taal Engels
This International Standard describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 ?m. The grid method is suitable if the lateral resolution is expected to be less than 1 ?m but more than 20 nm. The goldisland method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm. Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.

Details

ICS-code 71.040.40
Nederlandse titel Chemische analyse van oppervlakken - Auger elektronenspectrometers en r?ntgenfotoelektronenspectrometers - Bepaling van zijdelingse resolutie
Engelse titel Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution
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