Norm

ISO 18516:2019 en

Chemische analyse van oppervlakken - Bepaling van laterale resolutie en scherpte bij straalgebaseerde methodes

149,56 180,97 Incl BTW

Over deze norm

Status Definitief
Aantal pagina's 53
Gepubliceerd op 01-01-2019
Taal Engels
ISO 18516 describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are - the straight edge method; - the narrow line method; - the grating method. This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.

Details

ICS-code 71.040.40
Nederlandse titel Chemische analyse van oppervlakken - Bepaling van laterale resolutie en scherpte bij straalgebaseerde methodes
Engelse titel Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres
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