Norm

ISO/DIS 14644-12:2016 en

Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

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Over deze norm

Status Ontwerp
Aantal pagina's 14
Commissie Cleanrooms
Gepubliceerd op 30-10-2016
Taal Engels
This part of ISO 14644 covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less - “nanoscale” - are considered. The monitoring given in this document is for use mainly in “operational” states. Note 1 to entry For the purposes of this document, reference will be made to “nanoscale particles”, which here signify all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. Note 2 to entry It should be noted that the actual behaviour of particles in the cleanroom depends on their sources and physical behaviour. Note 3 to entry Health and safety considerations are excluded from this document.

Details

ICS-code 13.040.35
Nederlandse titel Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
Engelse titel Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

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