Norm

ISO/DIS 18516:2015 en

Chemische analyse van oppervlakken - Bepaling van laterale resolutie en scherpte bij straalgebaseerde methodes

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Over deze norm

Status Ontwerp
Aantal pagina's 45
Gepubliceerd op 02-03-2015
Taal Engels
This International Standard describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view as well to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector.

Details

ICS-code 71.040.40
Nederlandse titel Chemische analyse van oppervlakken - Bepaling van laterale resolutie en scherpte bij straalgebaseerde methodes
Engelse titel Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods
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