Norm

ISO/TR 19319:2013 en

Chemische analyse van oppervlakken - Fundamentele benaderingen tot de bepaling van laterale resolutie en scherpte in lichtbundel gebaseerde methoden

164,52

Over deze norm

Status Definitief
Aantal pagina's 116
Gepubliceerd op 15-03-2013
Taal Engels
This Technical Report describes: a) Functions and their relevance to lateral resolution: 1) Point spread function (PSF); 2) Line spread function (LSF); 3) Edge spread function (ESF); 4) Modulation transfer function (MTF); 5) Contrast transfer function (CTF). b) Experimental methods for the determination of lateral resolution and parameters related to lateral resolution: 1) Imaging of a narrow stripe; 2) Imaging of a sharp edge; 3) Imaging of square-wave gratings. c) Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

Details

ICS-code 71.040.40
Nederlandse titel Chemische analyse van oppervlakken - Fundamentele benaderingen tot de bepaling van laterale resolutie en scherpte in lichtbundel gebaseerde methoden
Engelse titel Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
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