Norm

ISO/TR 19319:2013 en

Chemische analyse van oppervlakken - Fundamentele benaderingen van de bepaling van de laterale resolutie en scherpte in op lichtbundels gebaseerde methoden

164,52 199,07 Incl BTW

Over deze norm

Status Definitief
Aantal pagina's 116
Gepubliceerd op 15-03-2013
Taal Engels
This Technical Report describes: a) Functions and their relevance to lateral resolution: 1) Point spread function (PSF); 2) Line spread function (LSF); 3) Edge spread function (ESF); 4) Modulation transfer function (MTF); 5) Contrast transfer function (CTF). b) Experimental methods for the determination of lateral resolution and parameters related to lateral resolution: 1) Imaging of a narrow stripe; 2) Imaging of a sharp edge; 3) Imaging of square-wave gratings. c) Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

Details

ICS-code 71.040.40
Nederlandse titel Chemische analyse van oppervlakken - Fundamentele benaderingen van de bepaling van de laterale resolutie en scherpte in op lichtbundels gebaseerde methoden
Engelse titel Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
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