Norm

NEN-EN-IEC 62047-10:2011 en

Halfgeleiders - Micro-elektromechanische toestellen - Deel 10: Micro-pijler compressie test voor MEMS materialen

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Over deze norm

Status Definitief
Aantal pagina's 22
Commissie Halfgeleiders
Gepubliceerd op 01-09-2011
Taal Engels
This part of IEC 62047 specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a specimen is measured, and the compressive modulus of elasticity and yield strength can be obtained. The test piece is a cylindrical pillar fabricated on a rigid (or highly stiff) substrate by micromachining technologies, and its aspect ratio (ratio of pillar diameter to pillar height) should be more than 3. This standard is applicable to metallic, ceramic, and polymeric materials.

Details

ICS-code 31.080.99
Nederlandse titel Halfgeleiders - Micro-elektromechanische toestellen - Deel 10: Micro-pijler compressie test voor MEMS materialen
Engelse titel Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials

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