Norm

NEN-EN-IEC 62047-1:2016 en

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

172,08

Over deze norm

Status Definitief
Aantal pagina's 66
Commissie Halfgeleiders
Gepubliceerd op 01-04-2016
Taal Engels
NEN-EN-IEC 62047-1 defines terms for micro-electromechanical devices including the process of production of such devices.

Details

ICS-code 31.080.99
Nederlandse titel Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Engelse titel Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
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