Norm

NEN-EN-IEC 62047-21:2014 en

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

45,28

Over deze norm

Status Definitief
Aantal pagina's 26
Commissie Halfgeleiders
Gepubliceerd op 01-10-2014
Taal Engels
NEN-EN-IEC 62047-21 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 μm.

Details

ICS-code 31.080.99
Nederlandse titel Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
Engelse titel Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

Winkelwagen

Subtotaal:

Ga naar winkelwagen