Norm

NEN-EN-IEC 62047-3:2006 en;fr

Halfgeleiders - Micro-elektromechanische toestellen - Deel 3: Standaard beproeving dunne film voor trekproef

27,17

Over deze norm

Status Definitief
Aantal pagina's 15
Commissie Halfgeleiders
Gepubliceerd op 01-10-2006
Taal Engels, Frans
This International Standard specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. This International Standard is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.

Details

ICS-code 31.080.99
Nederlandse titel Halfgeleiders - Micro-elektromechanische toestellen - Deel 3: Standaard beproeving dunne film voor trekproef
Engelse titel Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

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