Norm

NEN-EN-ISO 14644-2:2016 en

Stof- en kiemarme ruimten en omgevingen - Deel 2: Monitoren om aan te tonen dat de luchtreinheid in de cleanroom voldoet aan de gestelde deeltjesconcentratielimiet

79,70

Over deze norm

Status Definitief
Aantal pagina's 14
Commissie Cleanrooms
Gepubliceerd op 01-01-2016
Taal Engels
NEN-EN-ISO 14644-2 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration. This part of ISO 14644 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 μm to 5 μm. Concentrations of ultrafine particles (particles smaller than 0,1μm) will be addressed in a separate standard.

Details

ICS-code 13.040.35
Nederlandse titel Stof- en kiemarme ruimten en omgevingen - Deel 2: Monitoren om aan te tonen dat de luchtreinheid in de cleanroom voldoet aan de gestelde deeltjesconcentratielimiet
Engelse titel Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
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