Norm

NEN-IEC 62047-30:2017 en

Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

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Over deze norm

Status Definitief
Aantal pagina's 20
Commissie Halfgeleiders
Gepubliceerd op 01-10-2017
Taal Engels
NEN-IEC 62047-30 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.

Details

ICS-code 31.080.99
31.140
Engelse titel Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

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