Norm

NEN-ISO 17973:2016 en

Chemische analyse van oppervlakken - Medium-resolutie Auger elektronische spectrometers - Kalibratie van energieschalen voor elementen schalen

52,53

Over deze norm

Status Definitief
Aantal pagina's 11
Gepubliceerd op 01-09-2016
Taal Engels
NEN-ISO 17973 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

Details

ICS-code 71.040.40
Nederlandse titel Chemische analyse van oppervlakken - Medium-resolutie Auger elektronische spectrometers - Kalibratie van energieschalen voor elementen schalen
Engelse titel Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
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