Norm

NEN-ISO 29301:2010 en

Microstralenanalyse - Elektronen micro-analyse - Kalibratiemethode van de vergrotingsschaal met gebruikmaking van referentiematerialen die periodieke diffractiepatronen geven

143,10

Over deze norm

Status Definitief
Aantal pagina's 40
Commissie Microstralen analyse
Gepubliceerd op 01-06-2010
Taal Engels
This International Standard specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This International Standard is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This International Standard also refers to the calibration of a scale bar. This International Standard does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).

Details

ICS-code 37.020
Nederlandse titel Microstralenanalyse - Elektronen micro-analyse - Kalibratiemethode van de vergrotingsschaal met gebruikmaking van referentiematerialen die periodieke diffractiepatronen geven
Engelse titel Microbeam analysis - Analytical transmission electron microscopy - Methods for calibrating image magnification by using reference materials having periodic structures

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