Norm

NPR-ISO/TR 15969:2001 en

Chemische analyse van oppervlakken - Diepteprofielen - Meting van sputteringdiepte

48,19

Over deze norm

Status Definitief
Aantal pagina's 12
Gepubliceerd op 01-07-2001
Taal Engels
Gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered dept measurement described in this Technical Report are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres.

Details

ICS-code 71.040.40
Nederlandse titel Chemische analyse van oppervlakken - Diepteprofielen - Meting van sputteringdiepte
Engelse titel Surface chemical analysis - Depth profiling - Measurement of sputtered depth

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