Norm

NPR-ISO/TS 25138:2011 en

Chemische analyse van oppervlakken - Analyse van metaaloxide films door gloeiontlading van optische-emissiespectrometrie

143,10

Over deze norm

Status Definitief
Aantal pagina's 36
Gepubliceerd op 01-01-2011
Taal Engels
This Technical Specification describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films. This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

Details

ICS-code 71.040.40
Nederlandse titel Chemische analyse van oppervlakken - Analyse van metaaloxide films door gloeiontlading van optische-emissiespectrometrie
Engelse titel Surface chemical analysis - Analysis of metal oxide films by glow-discharge optical-emission spectrometry

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