Norm

NVN-ENV 50219:1996 en

Beschrijving van de betrouwbaarsheidsbeproevingsstructuur van de Europese mini proef-chip

61,30

Over deze norm

Status Definitief
Aantal pagina's 35
Commissie Symbolen en tekeningen
Gepubliceerd op 01-03-1996
Taal Engels
The purpose of the reliability test chip RTC is to provide a minimum set of test structures for a fast reliability assessment of emerging CMOS technologies down to 0,5 µm. The basic test structures described in this document are used as test vehicles to obtain information about failure mechanisms even in non-mature semiconductor technologies. The failure mechanisms which are addressed by the RTC are the following: 1 - latch up; 2 - hot carrier degradation of transistors; 3 - time dependent dielectric breakdown of thin oxides; 4 - electromogration in metal lines and contacts. The number of test samples and the failure criteria will depend on the purpose of the test.

Details

ICS-code 31.200
35.240.99
Nederlandse titel Beschrijving van de betrouwbaarsheidsbeproevingsstructuur van de Europese mini proef-chip
Engelse titel Description of the realiability test structures of the European mini test chip

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