Norm

NVN-ENV 50219:1996 en

Beschrijving van de betrouwbaarsheidsbeproevingsstructuur van de Europese mini proef-chip

62,22 75,29 Incl BTW

Over deze norm

Status Definitief
Aantal pagina's 35
Commissie Symbolen en tekeningen
Gepubliceerd op 01-03-1996
Taal Engels
The purpose of the reliability test chip RTC is to provide a minimum set of test structures for a fast reliability assessment of emerging CMOS technologies down to 0,5 ┬Ám. The basic test structures described in this document are used as test vehicles to obtain information about failure mechanisms even in non-mature semiconductor technologies. The failure mechanisms which are addressed by the RTC are the following: 1 - latch up; 2 - hot carrier degradation of transistors; 3 - time dependent dielectric breakdown of thin oxides; 4 - electromogration in metal lines and contacts. The number of test samples and the failure criteria will depend on the purpose of the test.

Details

ICS-code 31.200
35.240
Nederlandse titel Beschrijving van de betrouwbaarsheidsbeproevingsstructuur van de Europese mini proef-chip
Engelse titel Description of the realiability test structures of the European mini test chip

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